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[IEEE [1993] Tenth Biennial University/Government/Industry Microelectronics Symposium - Research Triangle Park, NC, USA (18-19 May 1993)] [1993] Proceedings of the Tenth Biennial University/Government/Industry Microelectronics Symposium - Incorporation of plasma physics and plasma etching into the undergraduate microelectronics laboratory

✍ Scribed by Fleddermann, C.B.; Montoya, J.; Guel, S.; Hersee, S.D.; Kendall, D.; Jungling, K.

Book ID: 126732297
Publisher: IEEE
Year: 1993
Weight: 451 KB
Category: Article
ISBN-13: 9780780309906
DOI: 10.1109/UGIM.1993.297011

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