[IEEE [1993] IEEE/SEMI International Semiconductor Manufacturing Science Symposium - San Francisco, CA, USA (19-20 July 1993)] [1993 Proceedings] IEEE/SEMI International Semiconductor Manufacturing Science Symposium - Key factors in designing a manufacturing line to maximize tool utilization and minimize turnaround time

✍ Scribed by Martin, D.P.

• Book ID: 126630347
• Publisher: IEEE
• Year: 1993
• Weight: 444 KB
• Category: Article
• ISBN-13: 9780780312128
• DOI: 10.1109/ISMSS.1993.263701