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[IEEE 1992 Bipolar/BiCMOS Circuits and Technology Meeting - Minneapolis, MN, USA (7-8 Oct. 1992)] Proceedings of the 1992 Bipolar/BiCMOS Circuits and Technology Meeting - Optimization of shallow and deep trench isolation structures for ultra-high-speed bipolar LSIs

✍ Scribed by Itoh, N.; Yoshino, C.; Matsuda, S.; Tusboi, Y.; Inou, K.; Katsumata, Y.; Iwai, H.

Book ID: 120019333
Publisher: IEEE
Year: 1992
Weight: 313 KB
Category: Article
ISBN-13: 9780780307278
DOI: 10.1109/BIPOL.1992.274073

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