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[IEEE 1991 IEEE MTT-S International Microwave Symposium Digest - Boston, MA, USA (10-14 June 1991)] 1991 IEEE MTT-S International Microwave Symposium Digest - Sheet resistance measurements of implanted layers on silicon wafers using a microwave resistivity probe

✍ Scribed by Wang, M.S.; Bhimnathwala, H.; Yao, S.S.; Borego, J.M.

Book ID: 117998107
Publisher: IEEE
Year: 1991
Weight: 254 KB
Volume: 0
Category: Article
ISBN-13: 9780879425913
DOI: 10.1109/mwsym.1991.147217

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