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[IEEE 1989 IEEE Particle Accelerator Conference, . 'Accelerator Science and Technology - Chicago, IL, USA (20-23 March 1989)] Proceedings of the 1989 IEEE Particle Accelerator Conference, . 'Accelerator Science and Technology - X-ray lithography sources: a review

✍ Scribed by Murphy, J.B.

Book ID: 118261846
Publisher: IEEE
Year: 1989
Weight: 392 KB
Volume: 0
Category: Article
DOI: 10.1109/pac.1989.73241

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