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[IEEE 18th International Symposium on Discharges and Electrical Insulation in Vacuum - Eindhoven, Netherlands (17-21 Aug. 1998)] Proceedings ISDEIV. 18th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.98CH36073) - High-rate cathodic arc deposition [of semiconductor thin films]

✍ Scribed by Siemroth, P.; Schultrich, B.; Witke, T.

Book ID: 121298190
Publisher: IEEE
Year: 1998
Weight: 63 KB
Edition: 18
Volume: 2
Category: Article
ISBN-13: 9780780339538
DOI: 10.1109/DEIV.1998.738717

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