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[IEEE 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Miami Beach, FL, USA (Jan. 30 - Feb. 3, 2005)] 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Support loss in micromechanical disk resonators

✍ Scribed by Zhili Hao, ; Ayazi, F.

Book ID: 124154556
Publisher: IEEE
Year: 2005
Tongue: English
Weight: 853 KB
Category: Article
ISBN-13: 9780780387324
DOI: 10.1109/MEMSYS.2005.1453886

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