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[IEEE 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Miami Beach, FL, USA (Jan. 30 - Feb. 3, 2005)] 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Fully-differential poly-sic lame-mode resonator and checkerboard filter

✍ Scribed by Bhave, S.A.; Di Gao, ; Maboudian, R.; Howe, R.T.

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