[IEEE 15th Biennial University/Government/Industry Microelectronics Symposium - Boise, ID, USA (30 June-2 July 2003)] Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488) - SU-8 as an electron beam lithography resist

✍ Scribed by Williamson, F.; Shields, E.A.

• Book ID: 115495850
• Publisher: IEEE
• Year: 2003
• Weight: 191 KB
• Volume: 0
• Category: Article
• ISBN-13: 9780780379725
• DOI: 10.1109/ugim.2003.1225696