[IEEE 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 - Boston, MA, USA (30 April-2 May 2002)] 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) - A MEMS-based, high-sensitivity pressure sensor for ultraclean semiconductor applications

✍ Scribed by Henning, A.K.; Mourlas, N.; Metz, S.; Zias, A.

• Book ID: 118238422
• Publisher: IEEE
• Year: 2002
• Tongue: English
• Weight: 326 KB
• Volume: 0
• Category: Article
• ISBN-13: 9780780371583
• DOI: 10.1109/asmc.2002.1001596