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[IEEE 10th International Symposium on Electrets (ISE 10) Proceedings - Athens, Greece (22-24 Sept. 1999)] 10th International Symposium on Electrets (ISE 10). Proceedings (Cat. No.99 CH36256) - Influence of boron ion implantation on the mechanics and electret properties of Si/sub 3/N/sub 4/ single layer film

✍ Scribed by Xiaoqing Zhang, ; Zhongfu Xia, ; Yonggang Pan, ; Yewen Zhang,

Book ID: 118269752
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 296 KB
Edition: 1999
Volume: 0
Category: Article
ISBN-13: 9780780350250
DOI: 10.1109/ise.1999.832079

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