𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Identification of mechanical defects in MEMS using dynamic measurements for application in production monitoring

✍ Scribed by Ronny Gerbach; Matthias Ebert; Geert Brokmann; Thomas Hein; Joerg Bagdahn

Publisher
Springer-Verlag
Year
2010
Tongue
English
Weight
678 KB
Volume
16
Category
Article
ISSN
0946-7076

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Use of ion-energy distributions for the
Use of ion-energy distributions for the identification of species and production mechanisms in low-pressure DC discharges
✍ VΓ­ctor J. Herrero; Andrey M. Islyaikin; Isabel Tanarro πŸ“‚ Article πŸ“… 2008 πŸ› John Wiley and Sons 🌐 English βš– 165 KB

## Use of ion-energy distributions for the identification of species and production mechanisms in low-pressure DC discharges Mass spectrometry finds widespread application in the analysis of ion distributions in different kinds of plasmas. 1 In DC discharges, the ions reaching the cathode are usua