✦ LIBER ✦
IC-compatible two-level bulk micromachining process module for RF silicon technology
✍ Scribed by Nga Phuong Pham; Sarro, P.M.; Ng, K.T.; Burghartz, J.N.
- Book ID
- 114538791
- Publisher
- IEEE
- Year
- 2001
- Tongue
- English
- Weight
- 223 KB
- Volume
- 48
- Category
- Article
- ISSN
- 0018-9383
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