Hyperdoping of silicon with deep-level impurities by pulsed YAG laser melting

✍ Scribed by Umezu, Ikurou; Naito, Muneyuki; Kawabe, Daisuke; Koshiba, Yusuke; Nagao, Katsuki; Sugimura, Akira; Aoki, Tamao; Inada, Mitsuru; Saitoh, Tadashi; Kohno, Atsushi

• Book ID: 121543349
• Publisher: Springer
• Year: 2014
• Tongue: English
• Weight: 802 KB
• Volume: 117
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-014-8313-7