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Hydrophilicity Difference of TiO2 Thin Films Induced by Different Plasmas

✍ Scribed by Zhang Kuan-Xiang; Wang wen; Zhao Jian-Hua; Hou Ji-Lai; Zhang Yan; Fang Ying-Cui

Book ID: 116833363
Publisher: Elsevier
Year: 2012
Tongue: English
Weight: 828 KB
Volume: 32
Category: Article
ISSN: 1875-3892
DOI: 10.1016/j.phpro.2012.03.569

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## Photo-induced hydrophilic Oxygen flow ratio Self cleaning TiO 2 thin films were deposited by reactive radio frequency magnetron sputtering of Ti target at low working pressure (1 mTorr) and various O 2 and Ar flow ratios (R O2 = O 2 /(O 2 + Ar)). Properties of TiO 2 films were measured by field