✦ LIBER ✦
Hydrogenated microcrystalline silicon thin films deposited by RF-PECVD under low ion bombardment energy using voltage waveform tailoring
✍ Scribed by E.V. Johnson; S. Pouliquen; P.A. Delattre; J.P. Booth
- Book ID
- 119301118
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 468 KB
- Volume
- 358
- Category
- Article
- ISSN
- 0022-3093
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