Hydrogenated crystalline silicon fabricated at low-substrate temperatures by reactive sputtering in He-H2 atmosphere

✍ Scribed by T. Imura; K. Mogi; A. Hiraki; S. Nakashima; A. Mitsuishi

• Publisher: Elsevier Science
• Year: 1981
• Tongue: English
• Weight: 282 KB
• Volume: 40
• Category: Article
• ISSN: 0038-1098
• DOI: 10.1016/0038-1098(81)90158-7