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Hydrogenated amorphous silicon produced by laser induced chemical vapor deposition of silane

✍ Scribed by M. Meunier; J.H. Flint; D. Adler; J.S. Haggerty

Book ID
118332050
Publisher
Elsevier Science
Year
1983
Tongue
English
Weight
152 KB
Volume
59-60
Category
Article
ISSN
0022-3093

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Laser-induced chemical vapor deposition
Laser-induced chemical vapor deposition of hydrogenated amorphous silicon: Photovoltaic devices and material properties
✍ H.M. Branz; L.K. Liem; C.J. Harris; S. Fan; J.H. Flint; D. Adler; J.S. Haggerty πŸ“‚ Article πŸ“… 1987 πŸ› Elsevier Science βš– 644 KB

We report the growth by laser-induced chemical vapor deposition (LICVD) of hydrogenated amorphous silicon p-i-n and n-i-p photovoltaic devices. Properties of the LICVD material and devices were studied by examining the light and dark current density vs. voltage curves and the spectral quantum effici