Hydrogen silsesquioxane electron beam lithography for ultra-small single electron transistors in silicon on insulator

✍ Scribed by W. Daves; M. Ruoff; M. Fleischer; D.A. Wharam; D.P. Kern

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 296 KB
• Volume: 87
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2009.10.022