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Hydrogen related effects in a-Si:H studied by photothermal deflection spectroscopy

✍ Scribed by J. Serra; J. Andreu; G. Sardin; C. Roch; J.M. Asensi; J. Bertomeu; J. Esteve

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 240 KB
Volume: 170
Category: Article
ISSN: 0921-4526
DOI: 10.1016/0921-4526(91)90136-3

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✦ Synopsis

A study of thermal annealing of a-Si: H samples between 300 and 600°C has been carried out. At increasing annealing temperatures, the sub-gap absorption measured by PDS increases showing two inflections, centered at 375 and 550°C. The hydrogen content measured by thermal desorption spectroscopy evolves in the same temperature range, whereas the evolution of the hydrogen content deduced from the IR transmission spectra differs, decreasing sooner and vanishing already at about 450°C.

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