Hydrogen plasma treatment: desorption of atomic hydrogen from silicon surfaces studied by in-situ spectroscopic ellipsometry

✍ Scribed by P. Raynaud; J.P. Booth; C. Pomot

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 280 KB
• Volume: 170
• Category: Article
• ISSN: 0921-4526
• DOI: 10.1016/0921-4526(91)90165-b