Hydrogen-plasma-induced plate-like cavity clusters in single-crystalline germanium

✍ Scribed by J. Lauwaert; M.L. David; M.F. Beaufort; E. Simoen; D. Depla; P. Clauws

• Book ID: 103846515
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 407 KB
• Volume: 9
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2006.08.049