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Hydrogen passivation on Sequential Lateral Solidified poly-Si TFTs

โœ Scribed by L. Michalas; M. Koutsoureli; G.J. Papaioannou; D.N. Kouvatsos; A.T. Voutsas


Book ID
113797802
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
485 KB
Volume
90
Category
Article
ISSN
0167-9317

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Characterization of thin film transistor
โœ L. Michalas; G.J. Papaioannou; D.N. Kouvatsos; F.V. Farmakis; A.T. Voutsas ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 131 KB

Polycrystalline silicon quality is a key issue parameter for the performance and reliability of thin film transistors. Therefore in the present work, the material related electrical properties of TFTs fabricated on films crystallized by two different SLS-ELA procedures, 1-shot/overlapped irradiated,