Hydrogen passivation effects under negative bias temperature instability stress in metal/silicon-oxide/silicon-nitride/silicon-oxide/silicon capacitors for flash memories

✍ Scribed by Hee-Dong Kim; Ho-Myoung An; Yujeong Seo; Yongjie Zhang; Jong Sun Park; Tae Geun Kim

• Book ID: 104058075
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 449 KB
• Volume: 50
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/j.microrel.2009.09.008