✦ LIBER ✦
Hydrogen passivation and CO2 laser annealing of the interface between Ar+ laser recrystallized Poly-Si and SiO2 substrate
✍ Scribed by Huang, Xin-Fan ;Bao, Xi-Mao ;Chen, Jian
- Book ID
- 105381313
- Publisher
- John Wiley and Sons
- Year
- 1989
- Tongue
- English
- Weight
- 353 KB
- Volume
- 113
- Category
- Article
- ISSN
- 0031-8965
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