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Hydrogen isotope tracer experiment in a-C:H film deposition: Reactive RF magnetron sputtering with CH4 and D2
✍ Scribed by Sekiba, D.; Takemoto, N.; Okada, M.; Ishii, S.; Sakurai, T.; Akimoto, K.
- Book ID
- 122786183
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 316 KB
- Volume
- 27-28
- Category
- Article
- ISSN
- 0925-9635
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