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Hydrogen incorporation in boron-doped 6H-SiC CVD epilayers produced using site-competition epitaxy

✍ Scribed by D. J. Larkin; S. G. Sridhara; R. P. Devaty; W. J. Choyke


Book ID
112817038
Publisher
Springer US
Year
1995
Tongue
English
Weight
607 KB
Volume
24
Category
Article
ISSN
0361-5235

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