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Hydrogen-halogen chemistry on semiconductor surfaces

✍ Scribed by Stephen M. Cohen; Terttu I. Hukka; Yuemei L. Yang; Mark P. D'Evelyn

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 413 KB
Volume: 225
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90146-g

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