Hydrogen etching of GaN and its application to produce free-standing GaN thick films

✍ Scribed by Yen-Hsien Yeh; Kuei-Ming Chen; Yin-Hao Wu; Ying-Chia Hsu; Tzu-Yi Yu; Wei-I Lee

• Book ID: 116629995
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 776 KB
• Volume: 333
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/j.jcrysgro.2011.08.022