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Hydrogen diffusion in the a-Si-Ge alloy system

✍ Scribed by W. Beyer; H.C. Weller; U. Zastrow

Book ID
117146929
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
246 KB
Volume
137-138
Category
Article
ISSN
0022-3093

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## Abstract A combined study of hydrogenated sputtered single a‐Si and a‐Ge layers and a‐Si/a‐Ge multilayers (MLs) has been carried out in order to establish the reasons of H release and associated structural degradation of the MLs when they are submitted to annealing. ERDA analysis of the single l