Hydrogen depth profiling in bevelled proton-implanted semiconductors by 4He ERDA and 19F NRA

✍ Scribed by C. Ascheron; D. Lehmann; C. Neelmeijer; A. Schindler; F. Bigl

• Book ID: 113282694
• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 952 KB
• Volume: 63
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(92)95214-c