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Hydrogen-atom assisted CVD of copper at low temperatures and in-situ gas-phase spectroscopy studies

✍ Scribed by Wei W. Lee; Peter S. Locke

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 639 KB
Volume: 262
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(95)05833-8

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