✦ LIBER ✦
Hydrogen and processing damage in CMOS device reliability: defect passivation and depassivation during plasma exposures and subsequent annealing
✍ Scribed by O.O. Awadelkarim; S.J. Fonash; P.I. Mikulan; M. Ozaita; Y.D. Chan
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 394 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0167-9317
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