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Hydrogen and deuterium profile in homoepitaxially grown CVD diamonds by ERDA method

โœ Scribed by H. Yagi; K. Tanida; A. Hatta; T. Ito; A. Hiraki


Book ID
113287477
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
367 KB
Volume
118
Category
Article
ISSN
0168-583X

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## Abstract Hydrogen in a variety of forms (molecular hydrogen, atomic hydrogen, hydrocarbon radicals) is involved in diamond formation. The present work studies the incorporation of hydrogen and its bonding configuration in diamond films composed of diamond grains of varying size which were deposi