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Hydrogen analysis of CVD homoepitaxial diamond films by high-resolution elastic recoil detection

✍ Scribed by K. Kimura; K. Nakajima; S. Yamanaka; M. Hasegawa; H. Okushi


Book ID
114165593
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
93 KB
Volume
190
Category
Article
ISSN
0168-583X

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