✦ LIBER ✦
Hydrofluorocarbon plasma submicron silicon dioxide etch in an axisymmetric static magnetron
✍ Scribed by AJ Lamm; M Carrasco
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 671 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0042-207X
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