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Hydrodynamic magnetic seal

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
127 KB
Volume
2007
Category
Article
ISSN
1350-4789

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โœฆ Synopsis

This invention relates to a seal assembly for use in equipment in the electronics manufacturing industry that has a replaceable barrier to shield an elastomeric seal from direct exposure to a plasma. Commercially available seal and barrier shield assemblies comprise a bonded rubber seal and a continuous ring barrier that must be installed when the assembly is manufactured. Neither the bonded rubber seal, nor the barrier shield ring may be readily replaced in the

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them is significantly small, it does not affect the reciprocation of the displacer. As the seal is provided so as not to be restricted axially and radially, the displacer is kept closely contacted with the inner peripheral surface of the cylinder even if the displacer shifts eccentrically.