✦ LIBER ✦
Hybrid lithography: The marriage between optical and e-beam lithography. A method to study process integration and device performance for advanced device nodes
✍ Scribed by Steven Steen; Sharee J. McNab; Lidija Sekaric; Inna Babich; Jyotica Patel; Jim Bucchignano; Michael Rooks; David M. Fried; Anna W. Topol; Jim R. Brancaccio; Roy Yu; John M. Hergenrother; James P. Doyle; Ron Nunes; Raman G. Viswanathan; Sampath Purushothaman; Mary Beth Rothwell
- Book ID
- 108207622
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 305 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.