Hybrid approach to polymer grade transition control
β Scribed by Darrin Feather; Douglas Harrell; Richard Lieberman; Francis J. Doyle III
- Book ID
- 101421555
- Publisher
- American Institute of Chemical Engineers
- Year
- 2004
- Tongue
- English
- Weight
- 185 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0001-1541
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π SIMILAR VOLUMES
This paper describes the application of an industrial real-time optimization package (ROMeo 1 ) to the nonlinear model predictive control (NLMPC) of a simulated polymer grade transition. The NLMPC algorithm is formulated using orthogonal collocation to integrate the model equations, and sequential q
130 nm, ~20 X & Β±1 ) and SiO 2 (~15 nm) films. The deposition was performed by RF sputtering in 2.5 deposition cycles (1 cycle Β» 0.8 lm) at a deposition rate of 1.5 nm s Β±1 and a pressure below 1.0 10 Β±5 torr. Aluminum anodization was carried out in a 10 % phosphoric acid solution at 130 V and 7 C.