Humidity sensor using sol—gel-derived silica coating on quartz crystal
✍ Scribed by Hong-Tao Sun; Zhi-Tao Cheng; Xi Yao; Wojciech Wlodarski
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 284 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0925-4005
No coin nor oath required. For personal study only.
✦ Synopsis
Porous silica coatings on AT-cut quartz crystals are derived from the sol-gel process. Hydrochloric acid catalyst is used to accelerate hydrolysis and polymerization of a silica solution. Experimental results show that the noncrystalline silica material has a lot of nanometer pores. The resonant frequency of the coated quartz resonantors decreases with increasing relative humidity. The maximum frequency shit of 3.72 kHz due to humidity is achieved.
The response and long-term stability of the humidity sensor are investigated.
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