Humidity Sensing of Ordered Macroporous Silicon With ${\rm HfO} _{2}$ Thin-Film Surface Coating

✍ Scribed by Wang, Yun; Yeow, John T. W.

• Book ID: 120469309
• Publisher: IEEE
• Year: 2009
• Tongue: English
• Weight: 961 KB
• Volume: 9
• Category: Article
• ISSN: 1530-437X
• DOI: 10.1109/JSEN.2009.2016602