HRTEM observation on microstructures in the Ge-implanted silicon wafers re-processed by solid phase epitaxy

✍ Scribed by Qinghua Xiao; Hailing Tu; Qigang Zhou; Qing Chang; Guohu Zhang; Jing Wang; Tongda Ma

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 388 KB
• Volume: 9
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2006.01.044