How to reduce the Al-texture in AlN films during film preparation

✍ Scribed by Ju-qian Yin 阴聚乾, Xi-ming Chen 陈希明, Bao-he Yang 杨保和, Qian Zhang 张倩, Xiao-guo Wu 吴晓国

• Book ID: 118818552
• Publisher: Tianjin University of Technology
• Year: 2012
• Tongue: English
• Weight: 182 KB
• Volume: 8
• Category: Article
• ISSN: 1673-1905
• DOI: 10.1007/s11801-012-2274-x