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How to fabricate low-resistance metal-diamond contacts

✍ Scribed by Werner, M.; Job, R.; Denisenko, A.; Zaitsev, A.; Fahrner, W.R.; Johnston, C.; Chalker, P.R.; Buckley-Golder, I.M.

Book ID
122496510
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
475 KB
Volume
5
Category
Article
ISSN
0925-9635

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A new pulsed nucleation tungsten process, called ''PNL low-R s W'', has been developed that results in near-bulk resistivity even in ultra-thin tungsten films. This solution greatly diminishes the need to develop alternative films for contact fill, probably for several generations. The process is do