Homogeneity of multi-component hard coatings studied by surface analytical depth profiling and model calculations
✍ Scribed by Jehn, Hermann A.
- Publisher
- John Wiley and Sons
- Year
- 1998
- Tongue
- English
- Weight
- 369 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0142-2421
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✦ Synopsis
Hard nitride coatings Ðnd their use as protective layers on tools and machinery components and in the Ðeld of decorative applications. The interest is increasingly focused on ternary nitrides that are deposited by physical vapour deposition (PVD) techniques, often using a combination of multi-source arrangements with multifold sample rotations. In the present paper the elemental in-depth composition of multi-component hard coatings is discussed, presenting experimental results of (Ti,Pd)N, (Cr,Pd)N, (Ti,Cr)N, (Ti,Al)N, (Ti,Al,Zr)N and (Nb,Cr)N hard coatings. The AES and glow discharge optical spectroscopy in-depth analyses show an oscillating and more complex elemental distribution caused by the sample movement where a speciÐc surface area passes di †erent sources at di †erent distances and di †erent angles. These analyses agree with the results obtained by model calculations.