Hollow cathode discharge beams in vacuum processing: J R Morley, Trans 6 Vac Metall Conf, American Vacuum Society, 1964, 186–202.

• Book ID: 103448683
• Publisher: Elsevier Science
• Year: 1965
• Tongue: English
• Weight: 149 KB
• Volume: 15
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(65)91555-1