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HMDSO plasma polymerization and thin film optical properties

✍ Scribed by Rogério Pinto Mota; Douglas Galvão; Steven F. Durrant; Mário A.Bica De Moraes; Socrates de Oliveira Dantas; Mauricio Cantão

Book ID
107864766
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
471 KB
Volume
270
Category
Article
ISSN
0040-6090

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✍ Rino Morent; Nathalie De Geyter; Sandra Van Vlierberghe; Peter Dubruel; Christop 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 832 KB

Recently, plasma-polymerization at atmospheric pressure has become a promising technology due to its reduced equipment costs and its possibility of in-line processing. This paper focuses on plasma deposition by an atmospheric pressure dielectric barrier discharge (DBD) using hexamethyldisiloxane (HM