✦ LIBER ✦
History of some early developments in ion-implantation technology leading to silicon transistor manufacturing
✍ Scribed by Fair, R.B.
- Book ID
- 119781765
- Publisher
- IEEE
- Year
- 1998
- Tongue
- English
- Weight
- 549 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0018-9219
- DOI
- 10.1109/5.658764
No coin nor oath required. For personal study only.