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Hillock growth in thin films

โœ Scribed by Chaudhari, P.


Book ID
121013868
Publisher
American Institute of Physics
Year
1974
Tongue
English
Weight
1023 KB
Volume
45
Category
Article
ISSN
0021-8979

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A model for hillock growth in Al thin fi
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The dependence of total hillock volume (per unit area) on film thickness and annealing temperature has been studied in pure aluminum films. The total hillock volume (per unit area) increases linearly with both the film thickness and annealing temperature. Other characteristics involve a critical tem