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High‐pressure oxidation of titanium disilicide/polycrystalline silicon composite films

✍ Scribed by Rosner, S. J.; Amano, Jun; Turner, J. E.; Laderman, S. L.; Dervan, A.


Book ID
119938087
Publisher
American Institute of Physics
Year
1989
Tongue
English
Weight
634 KB
Volume
65
Category
Article
ISSN
0021-8979

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